Infinitesima is proud to announce the launch of a three-year collaborative development project aimed at enhancing the capabilities of its Metron3D 300 mm in-line wafer metrology system. The project includes leading industry partners such as ASML and Imec, and will focus on metrology innovations for advanced semiconductor applications, including hybrid bonding, high-NA EUV lithography, and 3D logic devices like complementary field-effect transistors (CFETs).
Leveraging Infinitesima’s proprietary Rapid Probe Microscope (RPM) technology, the Metron3D system will deliver high-speed imaging, interferometric accuracy, and deep three-dimensional (3D) surface detection. These advancements address the semiconductor industry’s growing demand for precise 3D metrology at high throughput levels, crucial for high-volume manufacturing and increasingly intricate device architectures.
As part of this initiative, Infinitesima will install a Metron3D system at Imec, a globally recognized research hub in nanoelectronics and digital technologies. The system will be instrumental in furthering development of next-generation devices and supporting high-NA EUV resist imaging efforts led by ASML and other partners. Close collaboration with Imec will also drive the evolution of new tool capabilities and in-line enhancements, ultimately enabling real-time 3D process control.
Infinitesima’s collaboration with Imec began in 2021, with a focus on nanoscale tomographic sensing for research and failure analysis using RPM. This new project signifies a major step forward—transitioning from research to production metrology and supporting the industry’s need to inspect and measure sub-nanometer features in complex 3D structures.
“We are delighted to extend our existing collaboration with Imec to support the critical metrology challenges of some of the most critical process steps for next-generation semiconductor processes,” said Peter Jenkins, CEO of Infinitesima.
With this expanded partnership, Infinitesima reaffirms its leadership in in-line semiconductor metrology and its commitment to enabling the next generation of semiconductor innovation.
